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Development of a PLD heater for continuous deposition and growth of superconducting layer

  • Jeongtae Kim (Cryogenic Apparatus Research Center, Korea Electrotechnology Research Institute) ;
  • Insung Park (Cryogenic Apparatus Research Center, Korea Electrotechnology Research Institute) ;
  • Gwantae Kim (Cryogenic Apparatus Research Center, Korea Electrotechnology Research Institute) ;
  • Taekyu Kim (Dept. of Nanomechatronics Engineering, Pusan National University) ;
  • Hongsoo Ha (Cryogenic Apparatus Research Center, Korea Electrotechnology Research Institute)
  • Received : 2023.06.12
  • Accepted : 2023.06.29
  • Published : 2023.06.30

Abstract

Superconducting layers deposited on the metal substrate using the pulsed laser deposition process (PLD) play a crucial role in exploring new applications of superconducting wires and enhancing the performance of superconducting devices. In order to improve the superconducting property and increase the throughput of superconducting wire fabricated by pulsed laser deposition, high temperature heating device is needed that provides high temperature stability and strong durability in high oxygen partial pressure environments while minimizing performance degradation caused by surface contamination. In this study, new heating device have been developed for PLD process that deposit and growth the superconducting material continuously on substrate using reel-to-reel transportation apparatus. New heating device is designed and fabricated using iron-chromium-aluminum wire and alumina tube as a heating element and sheath materials, respectively. Heating temperature of the heater was reached over 850 ℃ under 700 mTorr of oxygen partial pressure and is kept for 5 hours. The experimental results confirm the effectiveness of the developed heating device system in maintaining a stable and consistent temperature in PLD. These research findings make significant contributions to the exploration of new applications for superconducting materials and the enhancement of superconducting device performance.

Keywords

Acknowledgement

This research was supported by National R&D Program through the National Research Foundation of Korea (NRF) funded by Ministry of Science and ICT (2022M3I9A1076881)

References

  1. Campion, R., et al. "Design and performance of a reliable and low cost substrate heater for superconducting thin film deposition." Vacuum 46.2, p.195-197, 1995. https://doi.org/10.1016/0042-207X(94)E0039-2
  2. Park, C., et al. "Manufacturing of YBCO coated conductor using RABiTS as the texture template and pulsed laser for the multi-layer oxide film deposition." Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference. The Korean Institute of Electrical and Electronic Material Engineers, 2003.
  3. Soo-Jung Choi, et al. "Study on deposition conditions of YBCO films grown by pulsed laser deposition." Proceedings of the Korean Society for Superconductivity and Low Temperature Engineering, p.109-112, 2003
  4. Muhsin, Ali Eltayeb, and Mohamed Elhadi Elsari. "Design of Reliable and Low Cost Substrate Heater for Thin Film Deposition." International Journal of Mechanical and Mechatronics Engineering 6.8, p.1503-1508, 2012.
  5. Cillessen, J. F. M., M. J. M. De Jong, and X. Croize. "Improved uniformity of multielement thin films prepared by off-axis pulsed laser deposition using a new heater design." Review of scientific instruments 67.9, p. 3229-3237, 1996.
  6. Farhad, Syed Farid Uddin. "The effect of substrate temperature and oxygen partial pressure on the properties of nanocrystalline copper oxide thin films grown by pulsed laser deposition." Data in Brief 34, p.106644, 2021.
  7. Oh Won-Jae, Jae-Eun Kim, and Sang-Im Yoo. "Enhanced Pinning Properties of GdBa2Cu3O7-δ Films With the Gd 2O3 Nanoparticles." IEEE Transactions on Applied Superconductivity 27.4, p. 1-5, 2016. https://doi.org/10.1109/TASC.2016.2646318
  8. Sueyoshi, Tetsuro, et al. "Flux pinning properties in YBa2Cu3Oy films with BaSnO3 nano-rods and spatially-controlled Y2O3 nanodots." Physics Procedia 65, p. 137-140, 2015 https://doi.org/10.1016/j.phpro.2015.05.165
  9. Jiang, Guangyu, et al. "High-speed deposition of high-performance REBCO films by using a radiation assisted conductive heating PLD system." Ieee Transactions on Applied Superconductivity 29.5. p. 1-4, 2019. https://doi.org/10.1109/TASC.2019.2896462
  10. Ozaki, T., et al. "Flux pinning properties of Sm1+ xBa2- xCu3Oy films with BaZrO3 nanorods fabricated by low-temperature growth technique." Physica C: Superconductivity 468.15-20, p.1615-1618, 2008. https://doi.org/10.1016/j.physc.2008.05.083
  11. Sueyoshi, Tetsuro, et al. "Flux pinning properties in YBa2Cu3Oy films with BaSnO3 nano-rods and spatially-controlled Y2O3 nanodots." Physics Procedia 65, p. 137-140, 2015.  https://doi.org/10.1016/j.phpro.2015.05.165