Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Development of a Plate-type Megasonic with Cooling Pins for Sliced Ingot Cleaning

  • Hyunse Kim (Innovative Energy Machinery Research Division, Korea Institute of Machinery and Materials) ;
  • Euisu Lim (Innovative Energy Machinery Research Division, Korea Institute of Machinery and Materials)
  • Received : 2023.07.12
  • Accepted : 2023.09.05
  • Published : 2023.09.30
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Abstract

In this article, a plate-type megasonic cleaning system with cooling pins is proposed for the sliced ingot, which is a raw material of silicon (Si) wafers. The megasonic system is operated with a lead zirconate titanate (PZT) actuator, which has high electric resistance, thus when it is being operated, it dissipates much heat. So this article proposes a megasonic system with cooling pins. In the design process, finite element analysis was performed and the results were used for the design of the waveguide. The frequency with the maximum impedance value was 998 kHz, which agreed well with the measured value of 997 kHz with 0.1 % error. Based on the results, the 1 MHz waveguide was fabricated. Acoustic pressures were measured, and analyzed. Finally, cleaning tests were performed, and 90 % particle removal efficiency (PRE) was achieved over 10 W power. These results imply that the developed 1 MHz megasonic will effectively clean sliced ingot wafer surfaces.

Keywords

Acknowledgement

We are grateful to the contribution of Dr. Yang Lae Lee at Korea Institute of Machinery and Materials. This research was funded by the Korea Institute of Energy Technology Evaluation and Planning (KETEP), under the Korea government Ministry of Trade, Industry and Energy (Project, NE4560). And it was also supported by a research project (NK243C) of the Korea Institute of Machinery and Materials (KIMM).

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