Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Luminescent Properties of Y2O3:Eu3+ Thin Film Through Spin-coating and Rapid Thermal Annealing Process

스핀코팅 및 급속열처리 공정을 통해 형성된 Y2O3:Eu3+ 박막의 발광특성

  • Jehong Park (Department of Electrical Engineering, Display & Semiconductor Engineering, Pukyong National University) ;
  • Yongseok Jeong (Department of Electrical Engineering, Display & Semiconductor Engineering, Pukyong National University)
  • 박재홍 (부경대학교 전기공학부 디스플레이반도체전공) ;
  • 정용석 (부경대학교 전기공학부 디스플레이반도체전공)
  • Received : 2024.02.21
  • Accepted : 2024.03.20
  • Published : 2024.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

The europium doped yttrium oxide (Y2O3:Eu3+) thin film was formed on a Si substrate by the conventional spin-coating process followed by rapid thermal annealing (RTA) treatment. The spinning profiles such as rotation speed, acceleration and holding times were controlled during the spin-coating process for the best condition of the Y2O3:Eu3+ thin film. The RTA treatment was conducted for several temperature in order to crystallize the spin coated film. The Y2O3:Eu3+ thin film presented best performance in the conditions of 4000 rpm, 30 s and 10 s of rotation speed, acceleration time and holding time, respectively, at a fixed RTA temperature of 900 ℃.

Keywords

Acknowledgement

이 논문은 부경대학교 자율창의학술연구비(2023년)에 의하여 연구되었음.

References

  1. Chong, M. K., Pita, K., and Kam, C. H., "Photoluminescence of Y2O3:Eu3+ thin film phosphors by sol-gel deposition and rapid thermal annealing", J. Phys. Chem. Solids, Vol. 66, pp. 213~217, 2005.
  2. Afandi, M., Kang, H., Kang, T., Park, and J., Kim, J., "AC-Driven Ultraviolet-C Electroluminescence from an All-Solution-Processed CaSiO3:Pr3+ Thin Film Based on a Metal-Oxide-Semiconductor Structure", Adv. Mater. Interfaces, Vol. 9, pp. 1~6 (2200248), 2022.
  3. Benharrat, L., Guerbous, L., Bradai, D., Boukerika, A., Manseri, A., Selmi, N., Rahal, B., and Hamroun, M. S. E., "Preparation and characterization of luminescent YPO4: Eu3+ thin films using sol gel spin coating method", Thin Solid Films, Vol. 694, pp. 1~9 (137738), 2020.
  4. Erdogan, E., Turgut, G., and Yilmaz, M., "Sol-gel spin coating derived cadmium oxide semiconductor thin films: Effect of Lutetium contribution", Optik, Vol. 240, pp. 1~13 (166819), 2021.
  5. Timoumi, A., Albetran, H. M., Alamri, H. R., Alamri, S. N., and Low, I. M., "Impact of annealing temperature on structural, morphological and optical properties of GO-TiO2 thin films prepared by spin coating technique" Superlattice Microst., Vol. 139, pp. 1~8 (106423), 2020.
  6. Scarafagio, M., Tallaire, A., Chavanne, M., Cassir, M., Ringuede, A., Serrano, D., Goldner, P., and Ferrier, A., "Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y2O3 Thin Films through Optimized Thermal Annealing", Phys. Status Solidi A, Vol. 217, pp. 1~7 (1900909), 2020.
  7. Lee, Y., Hu, S., Water, W., Huang, Y., Yang, D., Shen, J., Tiong, K., and Huang, C., "Improved optical and structural properties of ZnO thin films by rapid thermal annealing", Vol. 143, pp. 250~254, 2007.
  8. Lee, Y., Hu, S., Water, W., Tiong, K., Feng, Z., Chen, Y., Huang, J., Lee, J., Huang, C., Shen, J., and Cheng, M., "Rapid thermal annealing effects on the structural and optical properties of ZnO films deposited on Si substrates", J. Lumin., Vol. 129, pp. 148~152, 2009.
  9. Song, S., Yang, T., Liu, J., Xin, Y., Li, Y., and Han, S., "Rapid thermal annealing of ITO films", Appl. Surf. Sci., Vol. 257, pp. 7061~7064, 2011.