• Title/Summary/Keyword: Dual-wavelength Calibration

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Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration (이중 파장 보정방법 기반 다이나믹 분광타원편광계의 안정도 최적화)

  • Choi, Inho;Kheiryzadehkhanghah, Saeid;Choi, Sukhyun;Hwang, Gukhyeon;Shim, Junbo;Kim, Daesuk
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.3
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    • pp.178-183
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    • 2021
  • This paper describes a dynamic spectroscopic ellipsometry based on dual-wavelength calibration. DSE provides ellipsometric parameters at rates above 20 Hz, but the interferometer's sensitivity to temperature makes it difficult for that proposed system to maintain stable 𝜟k over long periods of time. To solve this problem, we set up an additional path in the DSE to perform simulations of the polarization phase calibration method using dual wavelengths. Through simulation, we were able to eliminate most of the polarization phase error and maintain a stable 𝜟k in the long-term stability experiment for 10 hours. This is the result that the 𝜟k stability of the proposed system is improved tens of times compared to the existing system.

Interferometric Snapshot Spectro-ellipsometry: Calibration and Systematic Error Analysis

  • Dembele, Vamara;Choi, Inho;Kheiryzadehkhanghah, Saeid;Choi, Sukhyun;Kim, Junho;Kim, Cheong Song;Kim, Daesuk
    • Current Optics and Photonics
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    • v.4 no.4
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    • pp.345-352
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    • 2020
  • We describe a calibration method to improve the accuracy of interferometric snapshot spectroscopic ellipsometry employing a dual-spectrometer sensor scheme. Conventional spectral wavelength calibration of a spectrometer has been performed by using a calibration lamp having multiple peaks at specific wavelength. This paper shows that such a conventional spectrometer calibration method is inappropriate for the proposed interferometric snapshot spectroscopic ellipsometry to obtain highly accurate ellipsometric phase information. And also, systematic error analysis of interferometric snapshot spectroscopic ellipsometry is conducted experimentally.

Standard Calibration for Broadband and Narrowband Filters of KHAO 0.4 m Telescope

  • Ahn, Hojae;Jeong, Inhwan;Paek, Gregory S.H.;Lee, Sumin;Kim, Changgon;Pak, Soojong;Shim, Hyunjin;Im, Myungshin
    • The Bulletin of The Korean Astronomical Society
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    • v.46 no.2
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    • pp.76.1-76.1
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    • 2021
  • Maemi Dual Field Telescope System (MDFTS) is a dual telescope system located at Kyung Hee University. The system consists of 0.4 m telescope and 0.1 m telescope for wide-field observation. The 0.4 m telescope provides photometric observation which covers a field of view of 21'×16'. It has been used for various purposes with Johnson-Cousins UBVRI broadband filter system, e.g., SomangNet and Intensive Monitoring Survey of Nearby Galaxies. In this poster, we present the standard calibration result for our broadband filter system. Also, we suggest a new usage of the KHAO 0.4m telescope which is narrowband photometry by demonstrating the standard calibration of H-alpha filter. For flux calibration, not only R filter but also V filter is used for compensating the central wavelength discrepancy between R filter and H-alpha filter.

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Development and Application of Mueller Matrix Ellipsometry (Mueller Matrix Ellipsometry 제작 및 응용)

  • 방경윤;경재선;오혜근;김옥경;안일신
    • Journal of the Semiconductor & Display Technology
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    • v.3 no.1
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    • pp.31-34
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    • 2004
  • We develop Mueller-matrix spectroscopic ellipsometry based on dual compensator configuration. This technique is very powerful for measuring surface anisotropy in nano-scale, especially when materials show depolarization. Dual-rotating compensator configuration is adopted with the rotational ratio of 5:3 originally developed by Collins et al[1]. The instrument can provide 250-point spectra over the wavelength range from 230 nm to 820 nm in one irradiance waveform with minimum acquisition time of Tc=10 s. In this work, the results obtained in transmission modes are presented for the initial attempt. We present calibration procedures to diagnose the system from the utilized data collected in transmission mode without sample. We expect that the instrument will have important applications in thin films and surfaces that have anisotropy and inhomogeneity.

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Muller matrix ellipsometry 제작 및 응용

  • 방경윤;경재선;오혜근;김옥경;안일신
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2003.12a
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    • pp.12-17
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    • 2003
  • We develop Mueller-matrix spectroscopic ellipsometry based on dual compensator configuration. This technique is very powerful for measuring surface anisotropy in nano-scale, especially when materials show depolarization. Dual-rotating compensator configuration is adopted with the rotational ratio of 5:3 originally developed by Collins et al [1]. The instrument can provide 250-point spectra over the wavelength range from 230 nm to 820 nm in one irradiance waveform with minimum acquisition time of $Tc{\approx}10 s$. In this work, the results obtained in transmission modes are presented for the initial attempt. We present calibration procedures to diagnose the system from the utilize data collected in transmission mode without sample. We expect that the instrument will have important applications in thin films and surfaces that have anisotropy and inhomogeneity.

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IMAGING SPECTROMETRY FOR DETECTING FECES AND INGESTA ON POULTRY CARCASSES

  • Park, Bo-Soon;William R.Windham;Kurt C.Lawrence;Smith, Douglas-P
    • Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
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    • 2001.06a
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    • pp.3106-3106
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    • 2001
  • Imaging spectrometry or hyperspectral imaging is a recent development that makes possible quantitative and qualitative measurement for food quality and safety. This paper presents the research results that a hyperspectral imaging system can be used effectively for detecting fecal (from duodenum, cecum, and colon) and ingesta contamination on poultry carcasses from the different feed meals (wheat, mile, and corn with soybean) for poultry safety inspection. A hyperspectral imaging system has been developed and tested for the identification of fecal and ingesta surface contamination on poultry carcasses. Hypercube image data including both spectral and spatial domains between 430 and 900 nm were acquired from poultry carcasses with fecal and ingesta contamination. A transportable hyperspectral imaging system including fiber optically fabricated line lights, motorized lens control for line scans, and hypercube image data from contaminated carcasses with different feeds are presented. Calibration method of a hyperspectral imaging system is demonstrated using different lighting sources and reflectance panels. Principal Component and Minimum Noise Fraction transformations will be discussed to characterize hyperspectral images and further image processing algorithms such as image band ratio of dual-wavelength images and its histogram stretching with thresholding process will be demonstrated to identify fecal and ingesta materials on poultry carcasses. This algorithm could be further applied for real-time classification of fecal and ingesta contamination on poultry carcasses in the poultry processing line.

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