• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2023.05a
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• pp.61-62
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• 2023

In this study, the steel slag was immersed in CO₂ nano-bubble water by Electric arc funace it was accelerated aging was reviewed through XRD analysis. The main minerals of the electric furnace oxidized slag were spinel and gehlenite, and there was no change with the number of CO₂ nano-bubbles. Minerals such as larnite, calcio-olivine, agnetite, calcite, and spinel were distributed in electrically reduced slag, and the content of calcite more than doubled with CO₂ nano-bubble immersion. Therefore, it is judged that the acceleration aging of Electric arc funace reduced slag is effective according to the immersion of CO₂ nano-bubble.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2020.11a
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• pp.145-146
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• 2020

This study investigated the performance evaluation of polymer cement mortar for repairing concrete structures using calcium nitrite(Ca(NO₂)₂) and CO₂ nano-bubble mixing water to develop section-restoration methods for the repair and reinforcement of cracks. The evaluation items were strength and microstructure analysis at 28 days of age according to the change in the amount of calcium nitrite and the use of CO₂ nano-bubble water. As a result of the experiment, it was confirmed that the performance of polymer cement mortar for repairing concrete structures was improved by the generation of nitrite-based hydration products when calcium nitrite and CO₂ nano-bubble water were used.

• Applied Chemistry for Engineering
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• v.25 no.3
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• pp.324-329
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• 2014

Microalgae Nannochloropsis oculata (N. oculta) and Chlorella vulgaris (C. vulgaris) are important sources for biodisel because of the high content of neutral lipids. Stable nano bubble is maintained for a long time and therefore it is possible for use in biotechnology. In this study, effects of nano bubble oxygen or hydrogen water on the microalgae growth were characterized. The cell growth in nano bubble water was similar to that of control, and the total lipid content was rather low. But, chlorophyll content of N. oculata grown in nanno bubble oxygen and hydrogen water increased 54% and 30%, and increased 59%, 39% in C. vulgaris. Carotenoid content also increased 21%, 25% in N. oculata and 49%, 29% in C. vulgaris grown in nano bubble oxygen and hydrogen water. From these results, nano bubble water seems to enhance the photosynthetic capacity of microalgae.

• Environmental Engineering Research
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• v.24 no.3
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• pp.382-388
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• 2019

Although nanobubbles attract significant attention, their characteristics and applications have not been thoroughly defined. There are diverse opinions about the definition of nanobubbles and controversy regarding methods that verify their characteristics. This study defines nanobubbles as having a size less than $1{\mu}m$. The generation of these sub-micron (nano) bubbles may be verified by induced coalescence or light scattering. The size of a sub-micron (nano) bubbles may be measured by optical, and confocal laser scanning microscopy. Also, the size may be estimated by the relationship of bubble size with the dissolved oxygen concentration. However, further research is required to accurately define the average bubble size. The zeta potential of sub-micron (nano) bubbles decreases as pH increases, and this trend is consistent for micron bubbles. When the bubble size is reduced to about 700-900 nm, they become stationary in water and lose buoyancy. This characteristic means that measuring the concentration of sub-micron (nano) bubbles by volume may be possible by irradiating them with ultrasonic waves, causing them to merge into micron bubbles. As mass transfer is a function of surface area and rising velocity, this strongly indicates that the application of sub-micron (nano) bubbles may significantly increase mass transfer rates in advanced oxidation and aeration processes.

• Journal of the Korea institute for structural maintenance and inspection
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• v.25 no.6
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• pp.27-32
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• 2021

This study was conducted to improve the workability of cementitious composites using nano-bubble water. The used nano-bubble water contains 7% of nano-sized bubbles with an averaged bubble size of 750 nm. Various different types of cementitious composites including ultar-high performance concrete, lightweight cementitious composites, and high-strength mortar have been tested to identify the changes of material properties. From the use of nano-bubble water, it was confirmed that workability has been improved by 3-22%. On the other hand, other material characteristics such as compressive strength did not have noticeable changes. Therefore, it was proposed that the use of nano-bubble water can enhance workability of cementitious composites without having significant impact on other material properties.

• Applied Chemistry for Engineering
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• v.26 no.4
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• pp.421-426
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• 2015

Arthrospira platensis (A. platensis) has been used in various fields including dietary supplements as it contains a high protein content and large amounts of unsaturated fatty acids. In addition, it has some pigments such as phycocyanin, myxoxanthophyll and zeaxanthin and thus has been used as a food additive and antioxidant substance. Nano-bubble hydrogen is to dissolve more than the saturation solubility in water by injecting the hydrogen gas in the nano-bubble hydrogen water. The nano-bubbles are known to possess higher antioxidant properties in addition to anticancer effects. In this paper, Arthrospira platensis was cultured in both a normal medium with distilled water and nano-bubble hydrogen water medium and their properties were compared. The cell growth and the content of chlorophyll and carotenoid in the nano-bubble hydrogen water was 15% higher than that of the control. The level of phycocyanin in nano-bubble hydrogen water was also 7% higher than that of the control. However, there were little differences in the lipid content between the nano-bubble and control. To determine the content of the antioxidants, the level of flavonoid and polyphenol were measured. The level of flavonoid in nano-bubble hydrogen water was found to be more than 70% increased when comparing to that of the control, while the level of polyphenol was similar to each other.

• Journal of the Korean Geosynthetics Society
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• v.14 no.4
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• pp.139-146
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• 2015

This paper describes a effect of nano-bubble on removal of complex heavy metals, in order to remove pollutants of soil with copper (Cu) and lead (Pb) based on column test. It was conducted column test considering inflow and fine soil contents condition, and then it was analyzed removal effect of nano-bubble on Cu and Cu/Pb. The test result showed that the removal effect of the nano-bubble was higher than that of distilled water regardless of fine soil contents in case of Cu pollutant, and the removal effect of nano-bubble on heavy metals was found to have a significant impact on Pb than Cu in case of Cu/Pb pollutants. It was also analyzed that engineering properties (like a flow path and permeability) of soil due to void ratio has influenced a significant impact the pollutants removal of nano-bubble. The test results determined that nano-bubble can be applied as a flushing agent for priority target pollutant in complex heavy metals.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1934-1938
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• 2008

Formation of air bubble is the one of common defects in UV nano imprint lithography. Location of dispensing and volume of droplets are among the most important parameters in the process. ]n this study, UV curable resin droplets with different volumes were dispensed at different locations and pressed to investigate air bubble formation. By varying volume of droplet and dispensing location, process conditions were found for minimum air bubble area.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.6
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• pp.11-18
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• 2021

Nano bubble water is used in various washing processes, including cleaning of solar panels, salt rejection of roads, and cleaning precision parts of machines. High cleaning efficiency and water conservation are obtained by applying nano bubbles during pretreatment of the marine waste cleaning system. This study compared the salt rejection of nano bubble water, and it was revealed that marine waste was produced by wood immersed in 200,000 mg/L NaCl solution. Using tap water and nano bubble water for washing, comparisons of the surface salt concentrations of wood were determined according to the nozzle, orifice diameter, pump speed and washing time. Decreased surface salt concentration was observed on the wood surface with increasing washing time. Water consumption was optimal between 5- and 10-seconds washing time. Increasing orifice diameter of the nozzle reduced the spraying pressure, with consequent increase in the wood surface salt concentration, thereby establishing the importance of orifice diameter of the nozzle. Compared to levels obtained with tap water, salt concentration of the wood surface after washing with nano bubble water was 2.2% lower with sector nozzle, and 30.9% lower with circular nozzle. In the washing experiment using nano bubble water, the salt concentration on the wood surface was about 9.5 mg/L lower when washed with sector nozzle than the circular nozzle.