• 전기학회논문지P
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• 제51권2호
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• pp.77-81
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• 2002

In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.477-480
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• 1998

Sol-gel processing, which started some decades back as a laboratory curiosity, has proved to be a powerful and versatile technique for the synthesis of materials. The utility of the sol-gel method for producing glass and ceramic materials in the form of powders, fibers, thin films and bulk shapes with high purity, functional microstructures and potentially high chemical homogeneity at relatively low temperature (compared to conventional processing) has been discussed.

• 한국세라믹학회지
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• 제29권3호
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• pp.211-215
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• 1992

Crack free PbTiO3 ceramics were produced by sol-gel processing using alkoxide, which has not been reported to be successful. The PbTiO3 gels were prepared from Ti alkoxide and lead acetate without any dopants. They were calcined at $600^{\circ}C$ and miled to produce fine PbTiO3 powder. It was pressed into discs and they were sintered at 110$0^{\circ}C$ for a few hours. The sintered ceramics were relativley hard and dense as having about 96% of theoretical density of PbTiO3. Fabrication of pure PbTiO3 ceramics by sol-gel processing is possibly due to their small grain size and uniform distribution of residual stress created during cubic-tetragonal transition over large number of small grains in fine grain PbTiO3 ceramics.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2007년도 추계학술발표대회 및
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• pp.127.1-127.1
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• 2007

• 한국재료학회:학술대회논문집
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• 한국재료학회 2007년도 추계학술발표대회 및
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• pp.127.2-127.2
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• 2007

• 한국재료학회:학술대회논문집
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• 한국재료학회 2007년도 추계학술발표대회 및
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• pp.129.2-129.2
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• 2007

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.555-558
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• 2004

In this paper, the variable producing conditions of YBCO superconducting powder by use of sol-gel method was investigated. YBCO superconducting powder which was prepared by sol-gel method was shown the characteristic gel formation, particle size and its properties under variable preparation conditions, such as pH, drying and processing time, and powder heat treatment, etc.

• 한국안전학회지
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• 제13권1호
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• pp.85-91
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• 1998

Sol-gel derived silica films were prepared by dip-coating onto polymethylmethacylate with Tetraethoxysilane(TEOS) as starting materials. Film properties such as viscosity and thickness were investigated as a function of dip speed, waterprecursor ratio, sol aging time. IR spectra of the gel films prepared from TEOS at various R are given. At small values of R the absorption peaks assignable to C-H vibration in $-OC_2H_5$ groups are observed around 3000 and 1500-1300 $cm^{-1}$. These bands indicate that the -$-OC_2H_5$ groups are retained in the gel at small values of R because of incomplete hydrolysis of TEOS. Film behaviour was interpreted in terms of the dependence of hydrolysis and condensation rates on the interplay between sol pH and waterprecursor ratio. Film thickness was found to increase by approximately a factor of two as waterprecursor ratio increased from two to six. Film thickness also increased with sol prepolymerization time. Surface quality was correlated with processing conditions.

• E2M - 전기 전자와 첨단 소재
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• 제7권5호
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• pp.369-375
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• 1994

In this study, ferroelectric thin films of PZT with different Zr/Ti ratio were prepared by sol-get processing and annealed by rapid thermal annealing at >$500^{\circ}C$>$-700^{\circ}C$ for 10 sec. -1 min. Structures of the annealed films were examined by X-ray diffraction and SEM. Thin films of PZT with perovskite structure have been obtained by annealing at >$600^{\circ}C$ or above and for 20 seconds or longer. Maximum remnant polarization of 10.24.mu.C/cm$^{2}$ and minimum coercive field of 20.06 kV/cm were obtained from the 56/44 and 65/35 Zr/Ti composition films, respectively. Dielectric constant, .epsilon.$_{r}$ of 500-1300 and dielectric loss, tan .delta., of 0.01-0.035 were obtained from the films.s.

• 한국세라믹학회지
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• 제29권5호
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• pp.335-340
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• 1992

Undoped PbTiO3 ceramics was successfully prepared by using sol-gel process, which had not been fabricated due to its microcracks created by anisotropic stress during phase transition from cubic to tetragonal phase. Fabrication of undoped PbTiO3 ceramics via sol-gel processing was very much affected by the PbO content of the samples as well as PbO vapor from sintering atmosphere. Excess PbO was found to promote rapid grain growth in PbTiO3 ceramics. After sintering at 1100$^{\circ}C$ average grain size of PbTiO3 ceramics with excess PbO was about 8 times greater than that of stoichiometric composition, which may be due to PbO liquid phase from excess PbO.