반도체 제조 장비용 저 전압 DSP칩을 이용한 서보 모터의 벡터제어에 관한 연구

A Study on Vector control of AC motor using Low-Voltage DSP for semiconductor transportation equipments

In this study, the controller using TMS320LF2407 low voltage DSP for motor control is designed and realized. It has 40 MIPS calculating ability and its driving voltage is 3.3 V for low power. The peripheral elements, however usually use 5 V and they need voltage transfer interface. In this study, voltage transformation and reducing noise are studied and space vector PWM is adopted as a motor control scheme. According to these methods, the efforts for software programming and calculation processes are reduced. In addition, the hardware is also simplified by substituting the current control part with software programming. Through this study, the DSP based servo controller increases its ability for high performance multi-function on semiconductor transportation equipments..