Information Display (인포메이션 디스플레이)

The Korean Infomation Display Society (한국정보디스플레이학회)
권호 표지

Flexible Display용 산화물 TFT 기술개발 동향 및 전망

  • 오힘찬 (한국전자통신연구원 융합부품소재연구부문 신소자/소재연구부 산화물전자소자연구팀)
  • Published : 2010.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords

References

  1. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, Nature, 432, 488 (2004). https://doi.org/10.1038/nature03090
  2. M. Ito, M. Kon, T. Okubo, M. Ishizaki and N. Sekine Proc. Int. Display Workshop/Asia Display 2005 p.845 (2005).
  3. M. Ito, C. Miyazaki, N. Ikeda and Y. Kokubo 16th Int. Workshop on Active-Matrix Flatpanel Displays and Devices S-2 (2009).
  4. M-C. Sung, H-N. Lee, C. N. Kim, S. K. Kang, D. Y. Kim, S-J. Kim, S. K. Kim, S-K. Kim, H-G. Kim and S-T. Kim 7th Int. Meeting Information Display 9-1 (2007).
  5. J-S. Park, T. Kim, D. Stryakhilev, J-S. Lee, S-G. An, Y-S. Pyo, D-B. Lee, Y. G. Mo, D-U. Jin and H. K. Chung Appl. Phys. Lett. 95 013503 (2009). https://doi.org/10.1063/1.3159832
  6. W. Jackson, C. Taussig, R. Elder, SID 09 digest, 873 (2009).
  7. C-W. Chien, H-H. Hsieh, C-H. Wu, Y-T. Tsai, Y-C. Kung, P-C. Hsu, C-Y. Lin and C-C. Wu, SID 10 digest, 921 (2010).
  8. C. Y. Lee, M. Y. Lin, W. H. Wu, J. Y. Wang, Y. Chou, W. F. Su, Y. F. Chen and C. F. Lin Semicond. Sci. Technol, 25, 105008 (2010). https://doi.org/10.1088/0268-1242/25/10/105008
  9. W. B. Jackson, R. L. Hoffman, G. S. Herman, Appl. Phys. Lett. 87, 193503 (2005). https://doi.org/10.1063/1.2120895
  10. H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono, Thin Solid Films, 516, 7, 1516-1522 (2008). https://doi.org/10.1016/j.tsf.2007.03.161
  11. M. Ito, M. Kon, C. Miyazaki, N. Ikeda, M. Ishizaki, R. Matsubara, Y. Ugajin, and N. Sekine, Phys. Stat. Sol. A, 205, 8, 1885-1894 (2008). https://doi.org/10.1002/pssa.200778910
  12. W. Lim, J. H. Jang, S.-H. Kim, D. P. Norton, V. Craciun, S. J. Pearton, F. Ren, and H. Shen, Appl. Phys. Lett., 93, 082102 (2009).
  13. D. H. Kim, N. G. Cho, S. H. Han, H.-G. Kim, and I.-D. Kim, Electrochem. Solid-State Lett., 11, 12, H317-H319 (2008). https://doi.org/10.1149/1.2978961
  14. J. Lee, J.-S. Park, Y. S. Pyo, D. B. Lee, E. H. Kim, D. Stryakhilev, T. W. Kim, D. U. Jin, and Y.-G. Mo, Appl. Phys. Lett. 95, 123502, (2009). https://doi.org/10.1063/1.3232179
  15. L. Wang, M.-H. Yoon, G. Lu, Y. Yang, A. Facchetti, and T. J. Marks, Nature materials, 5,893, (2006). https://doi.org/10.1038/nmat1755
  16. D. Kang, H. Lim, C. Kim, I. Song, J. Park, Y. Park and J. Chung Appl. Phys. Lett. 90 192101 (2007). https://doi.org/10.1063/1.2723543
  17. J-S. Park, J. K. Jeong, H-J. Chung, Y-G. Mo and H. D. Kim Appl. Phys. Lett. 92 072104 (2008). https://doi.org/10.1063/1.2838380
  18. J. K. Jeong, H. W. Yang, J. H. Jeong, Y-G. Mo and H. D. Kim Appl. Phys. Lett. 93 123508 (2008). https://doi.org/10.1063/1.2990657
  19. B-S. Jeong et al Digest of Int. Meeting on Information Display p. 1040 (2009).
  20. A. Sato, K. Abe, R. Hayashi, H. Kumomi, K. Nomura, T. Kamiya, M. Hirano and H. Hosono Appl. Phys. Lett. 94 133502 (2009). https://doi.org/10.1063/1.3112566
  21. M. K. Ryu et al Digest of Int. Meeting on Information Display p. 330 (2009).
  22. T. Arai, N. Morosawa, K. Tokunaga, Y. Terai, E. Fukumoto, T. Fujimori, T. Nakayama, T. Yamaguchi and T. Sasaoka Digest of SID2010 p. 1033 (2010).
  23. M-C. Hung, W-T. Lin, J. J. Chang, P-L. Chen, C-Y. Wu, C-J. Lin, H-L. Chiu, C-Y. Huang and Y-C. Kao Int. Workshop on Transparent Amorphous Oxide Semiconductors (2010).
  24. H-S. Seo, J-U. Bae, D-H. Kim, Y. Park, C-D. Kim, I. B. Kang, I-J. Chung, J-H. Choi and J-M. Myoung Electrochem. Solid State Lett. 12 H348 (2009).
  25. T. Kamiya, K. Nomura and H. Hosono, Sci. Technol. Adv. Mater 11 044305 (2010). https://doi.org/10.1088/1468-6996/11/4/044305
  26. J. C. Park, S. Kim, S. Kim, C. Kim, I. Song, Y. Park, U-I. Jung, D. H. Kim, J-S. Lee Adv. Mater. 22, 5512-5516, (2010). https://doi.org/10.1002/adma.201002397
  27. E. Chong, Y. S. Chun, S. Y. Lee, Appl. Phys. Lett. 97, 102102 (2010). https://doi.org/10.1063/1.3479925
  28. C. H. Ahn, B. H. Kong, H. Kim and H. K. Cho, J. Electrochem. Soc. 158 (2) H170-H173 (2011). https://doi.org/10.1149/1.3525278
  29. M. Nakata, K. Takechi, T. Eguchi, E. Tokumitsu, H. Yamaguchi and S. Kaneko Jpn. J. Appl. Phys. 48 081607 (2009). https://doi.org/10.1143/JJAP.48.081607
  30. H-W. Zan, W-T. Chen, C-W. Chou, C-C. Tasi, C-N. Huang and H-W. Hsueh, Electrochem. Solid-state Lett. 13 H144-H146 (2010). https://doi.org/10.1149/1.3313201
  31. K. H. Cherenack, N. S. Munzenrieder and G. Troster, IEEE Electron Device Lett. 31, 11 (2010). https://doi.org/10.1109/LED.2009.2035145