공업화학 (Applied Chemistry for Engineering)

  • 제25권1호
  • /
  • Pages.53-57
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  • 2014
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  • 1225-0112(pISSN)
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  • 2288-4505(eISSN)
한국공업화학회 (The Korean Society of Industrial and Engineering Chemistry)
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전기화학적 마이크로머시닝 기술을 이용한 균일한 니오븀 표면 에칭 연구

Homeogenous Etched Pits on the Surface of Nb by Electrochemical Micromachining

  • Kim, Kyungmin (Department of Chemical Engineering, Inha University) ;
  • Yoo, Hyeonseok (Department of Chemical Engineering, Inha University) ;
  • Park, Jiyoung (Department of Chemical Engineering, Inha University) ;
  • Shin, Sowoon (Department of Chemical Engineering, Inha University) ;
  • Choi, Jinsub (Department of Chemical Engineering, Inha University)
  • 투고 : 2013.09.23
  • 심사 : 2013.11.11
  • 발행 : 2014.02.10
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초록

본 연구에서는 micro-contact printing을 통하여 니오븀 호일 표면 위에 균일한 에칭 pits를 형성하였다. 균일한 보호층을 형성하고자 전해연마의 효과를 확인하였으며, 기존의 $O_2$ 플라즈마 공정 없이 손쉽게 균일한 에칭 pits를 형성시킬 수 있는 조건을 확인하였다. 메탄올 혼합 전해질을 사용하여 10 min 동안 에칭을 진행한 결과 니오븀 호일 표면 위에 지름과 간격이 각각 $10{\mu}m$와 $5{\mu}m$로 잘 정렬된 에칭 pits를 관찰하였다.

We describe the preparation of highly-ordered etching pits on the Nb foil through a micromachining. The effects of electrochemical polishing on the formation of uniformly-patterned protective epoxy layer was investigated. Unlike the previous process using $O_2$ plasma, well-ordered etched pits were prepared without any dry processes. As a result, the Nb foil with the well-ordered pits of $10{\mu}m{\times}5{\mu}m$ could be obtained by electrochemical etching in methanolic electrolytes for 10 min.

키워드

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