Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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High Performance InGaZnO Thin Film Transistor by Atmospheric Pressure Ar Plasma Treatment

대기압 아르곤 플라즈마 처리를 통한 IGZO TFT의 전기적 특성 향상 연구

  • Jeong, Byung-Jun (Dept. of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Jeong, Jun-Kyo (Dept. of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Park, Jung-Hyun (Dept. of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Kim, Yu-Jung (Dept. of Electronic Radio Information Communication Engineering, Chungnam National University) ;
  • Lee, Hi-Deok (Dept. of Electronics Engineering, Chungnam National University) ;
  • Choi, Ho-Suk (Dept. of Chemical Engineering, Chungnam National University) ;
  • Lee, Ga-Won (Dept. of Electronics Engineering, Chungnam National University)
  • 정병준 (충남대학교 전자전파정보통신공학과) ;
  • 정준교 (충남대학교 전자전파정보통신공학과) ;
  • 박정현 (충남대학교 전자전파정보통신공학과) ;
  • 김유정 (충남대학교 전자전파정보통신공학과) ;
  • 이희덕 (충남대학교 전자공학과) ;
  • 최호석 (충남대학교 응용화학공학과) ;
  • 이가원 (충남대학교 전자공학과)
  • Received : 2017.11.29
  • Accepted : 2017.12.22
  • Published : 2017.12.31
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Abstract

In this paper, atmospheric pressure plasma treatment was proposed for high performance indium gallium zinc oxide thin film transistor (IGZO TFT). RF Ar plasma treatment is performed at room temperature under atmospheric pressure as a simple and cost effective channel surface treatment method. The experimental results show that field effect mobility can be enhanced by $2.51cm^2/V{\cdot}s$ from $1.69cm^2/V{\cdot}s$ to $4.20cm^2/V{\cdot}s$ compared with a conventional device without plasma treatment. From X-ray photoelectron spectroscopy (XPS) analysis, the increase of oxygen vacancies and decrease of metal-oxide bonding are observed, which suggests that the suggested atmospheric Ar plasma treatment is a cost-effective useful process method to control the IGZO TFT performance.

Keywords

References

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