반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
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샌드위치 구조를 갖는 은 나노와이어 기반 고감도 저항성 압력 센서

Sandwich-structured High-sensitivity Resistive Pressure Sensor based on Silver Nanowire

  • 이진영 (한국기술교육대학교 창의융합공학협동과정) ;
  • 김기은 (한국기술교육대학교 창의융합공학협동과정) ;
  • 신동균 (한국기술교육대학교 창의융합공학협동과정) ;
  • 박종운 (한국기술교육대학교 창의융합공학협동과정)
  • Lee, Jinyoung (Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education) ;
  • Kim, Gieun (Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education) ;
  • Shin, Dongkyun (Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education) ;
  • Park, Jongwoon (Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education)
  • 투고 : 2018.04.26
  • 심사 : 2018.06.19
  • 발행 : 2018.06.30
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초록

Elastic resistive pressure sensor is fabricated by a direct spray coating of silver nanowires (AgNWs) on uncured polydimethylsiloxane (PDMS) and an additional coating of a conductive polymer, poly(3,4-ethylenedioxythiophene): poly (styrene sulfonate) (PEDOT:PSS). To improve the sensitive and stability, we have fabricated sandwich-structured AgNW/polymer sensor where two AgNW/polymer-coated PDMS films are laminated with the conducting surfaces contacted by pressure lamination. It shows a resistance decrease upon loading due to the formation of dense network of AgNWs. It is demonstrated that the sandwich-structured AgNW/polymer sensor exhibits very high sensitivity ($2.59kPa^{-1}$) and gauge factor (37.8) in the low pressure regime. It can also detect a subtle placement and removal of a weight as low as 3.4 mg, the corresponding pressure of which is about 5.4 Pa. It is shown that the protrusion of AgNWs from PDMS is suppressed substantially by the over-coated PEDOT:PSS layer, thereby reducing hysteresis and rendering the sensor more stable.

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참고문헌

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