Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

A study on the Width Measurement of Image Patterns Using Gaussian Interpolation

가우시간 보간을 이용한 영상 패턴의 폭 측정에 관한 연구

  • Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
  • 김경범 (한국교통대학교 기계자동차항공공학부)
  • Received : 2022.08.01
  • Accepted : 2022.09.19
  • Published : 2022.09.30
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper, a method for measuring image pattern widths is proposed using gaussian interpolation, in order to improve inconsistent results coming from the different directions in image patterns. The performance of our method is evaluated using image patterns with 9 directions, and compared with previous methods. It is confirmed that the proposed method gives accurate and consistent width results regardless of pattern directions.

Keywords

Acknowledgement

논문은 2022년 한국교통대학교 지원을 받아 수행하였음.

References

  1. Alasdair McAndrew, Introduction Digital Image Processing with MATLAB, Cengage Learning, 2007.
  2. Yao, Y. and Ju, H., "A Sub-pixel Edge Detection Method based on Canny Operator," Proceedings of the 6th International Conference on Fuzzy Systems and Knowledge Discovery, pp. 97-100, 2009.
  3. Tabatabai, A. J. and Mitchell, O. R., "Edge Location to Subpixel Values in Digital Imagery," IEEE Transaction Pattern Analysis and Machine Intelligence, Vol.6, No.2, pp.188-201, 1984. https://doi.org/10.1109/TPAMI.1984.4767502
  4. Lyvers, E. P., Mitchell, O. R., Akey, M. L. and Reeves A. P., "Subpixel Measurements Using a Moment-Based Edge Operator," IEEE Transaction Pattern Analysis and Machine Intelligence, Vol.11, No.12, pp.1293-1309, 1989. https://doi.org/10.1109/34.41367
  5. Kaur, A. and Singh, C., "Sub-Pixel Detection Using Pseudo Zernike Moment," International Journal of Signal Processing Image Processing and Pattern Recognition, Vol.4, No.2, pp.107-118, 2011.
  6. Khademi, S., et al, "A Sub Pixel Resolution Method," World Academy of Science, Engineering and Technology, Vol. 70, pp. 633-636, 2010.
  7. Pan, S. Y., et al, "Sub-pixel Position Estimation Algorithm based on Gaussian Fitting and Sampling Theorem Interpolation for Wafer Alignment," Applied Optics, Vol. 60, Issue 31, pp. 9607-9618, 2021. https://doi.org/10.1364/AO.437440
  8. https://www.matrox.com/en/imaging, Matrox Imaging Library
  9. Kim, G. B., "A Study on the Precision Pattern Measurement Based on Gradient Transition Vector," Journal of the Korean Society of Semiconductor & Display Technology, Vol. 20, No. 3, pp. 45-50, 2021.
  10. Nayar, S. K., "Shape form focus," IEEE Trans. Pattern Analysis and Machine Intelligence, Vo. 16, No. 8, pp. 824-831, 1994. https://doi.org/10.1109/34.308479