Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Operating Principle of Residual Gas Analyzer

잔류가스분석기 (RGA)의 작동원리

  • Park, C.J. (Advanced Instrumentation Center, Korea Research Institute of Standards and Science)
  • 박창준 (한국표준과학연구원 차세대계측기센타)
  • Published : 2008.07.30
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Abstract

The residual gas analyzer (RGA) is employed for the process control of a vacuum system by measuring residual gases in it. This review paper introduces operating principles of the RGA and problems that can be encountered during use, together with their possible solutions.

진공시스템 안의 잔류가스를 측정하여 공정제어에 이용되는 잔류가스분석기의 주요부품인 이온원, 사중극자질량분석기, 이온검출부의 작동원리와 사용 상 발생될 수 있는 문제점 및 가능한 해결방법을 소개한다.

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References

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