Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Fume Particle Dispersion in Laser Micro-Hole Machining with Oblique Stagnation Flow Conditions

경사 정체점 유동이 적용된 미세 홀 레이저 가공 공정의 흄 오염입자 산포특성 연구

  • Kim, Kyoungjin (Department of Mechanical System Engineering, Kumoh National Institute of Technology) ;
  • Park, Joong-Youn (Department of Mechanical System Engineering, Kumoh National Institute of Technology)
  • 김경진 (금오공과대학교 기계시스템공학과) ;
  • 박중윤 (금오공과대학교 기계시스템공학과)
  • Received : 2021.08.27
  • Accepted : 2021.09.11
  • Published : 2021.09.30
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Abstract

This numerical study focuses on the analysis of fume particle dispersion characteristics over the surface of target workpiece in laser micro-hole machining process. The effects of oblique stagnation flow over fume generating machining point are examined by carrying out a series of three-dimensional random particle simulations along with probabilistic particle generation model and particle drag correlation of low Reynolds number. Present computational model of fume particle dispersion is found to be capable of assessing and quantifying the fume particle contamination in precision hole machining which may influenced by different types of air flow patterns and their flow intensity. The particle size dependence on dispersion distance of fume particles from laser machining point is significant and the effects of increasing flow oblique angle are shown quite differently when slot blowing or slot suction flows are applied in micro-hole machining.

Keywords

Acknowledgement

본 연구는 금오공과대학교 학술연구비에 의하여 지원된 논문이다.

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